JPH0229462U - - Google Patents
Info
- Publication number
- JPH0229462U JPH0229462U JP10879588U JP10879588U JPH0229462U JP H0229462 U JPH0229462 U JP H0229462U JP 10879588 U JP10879588 U JP 10879588U JP 10879588 U JP10879588 U JP 10879588U JP H0229462 U JPH0229462 U JP H0229462U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- susceptor
- stage
- growth
- upper block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10879588U JPH0229462U (en]) | 1988-08-18 | 1988-08-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10879588U JPH0229462U (en]) | 1988-08-18 | 1988-08-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0229462U true JPH0229462U (en]) | 1990-02-26 |
Family
ID=31344467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10879588U Pending JPH0229462U (en]) | 1988-08-18 | 1988-08-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0229462U (en]) |
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1988
- 1988-08-18 JP JP10879588U patent/JPH0229462U/ja active Pending